The team — led by physicist Andrew Turberfield and chemist Bob Denning, both of the University of Oxford, United Kingdom — started by building photoresist films thick enough to carve a 3D matrix out of. (sciencemag.org)
But there's one component of the chip - making process in need of an overhaul if Moore's law is to continue: the chemical mixture called photoresist. (sciencedaily.com)
And importantly, they have done so by characterizing the chemistry of photoresist, crucial to further improve performance in a systematic way. (sciencedaily.com)