We employed self - assembly of Si NDs where ion beam mixing transfers SiO2 to SiOx and subsequent phase separation forms the Si NC in the c - Si / SiO2 / a-Si nanopillar.
The beam passed through a chamber where a laser knocked the extra electrons off of about 7 % of the ions, leaving a mix of hydrogen and negatively charged hydrogen ions to react with each other farther down the tube.