Using
microfabrication methods, AFM cantilevers are modified to mount directionally oriented crystals tips.
That type of sensor consists of solid spheres and is not compatible with
microfabrication methods, but recently Tadigadapa and his team developed an innovative way to grow on - chip glass microspherical shells with incredible sensitivities that potentially can be used for motion, temperature, pressure or biochemical sensing.
Not exact matches
The trick to getting the size down, says project leader John Kitching of NIST, was combining numerous
microfabrication tricks, including a novel
method for trapping cesium atoms in tiny glass cells, a technique developed by his collaborators, Svenja Knappe and Li - Anne Liew, also at NIST.
He has contributed significantly to EMSL since it opened in 1997, particularly in advancing microtechnologies such as micromodeling experimental capabilities, developing sensing
methods for microenvironments, and revitalizing the
microfabrication facility.