Not exact matches
The reasons for this failure are probably to a
large degree «social», in that laypeople were not
sufficiently instructed to see the point, while working conditions doubtless also made their contribution.
«You need many tonnes of these particles for a
large facility, so the economic feasibility of the concept depends significantly on being able to produce them easily and to a
sufficiently high
degree of quality,» says Stefan Penthor.
This new dissociative δ - mode is characterized by a high dissociation
degree of gas molecules (actually up to 100 % in NF3 and up to 70 % in SiH4), higher resistivity and a
large discharge current.At rather high rf voltage when a
sufficiently large number of high energy electrons appear in the discharge, an intense dissociation of gas molecules via electron impact begins, and the discharge experiences a transition to the dissociative δ - mode.