The Korean - led researchers first used a technique called chemical vapor deposition to grow graphene atop large sheets of copper foil. (sciencemag.org)
They demonstrated on a 300 mm pre-industrial platform a new level of isotopic purification in a film deposited by chemical vapor deposition (CVD). (nanotech-now.com)
The team integrated a three - dimensional array of carbon nanotubes into a microfluidic device by using chemical vapor deposition and photolithography to grow and pattern carbon nanotubes onto silicon wafers. (sciencedaily.com)