By engravings using electron beam lithography, the waveguides of several micrometers in length are provided with finest cavities of a few nanometers in size. (sciencedaily.com)
Irene Dolado, PhD student at nanoGUNE, and Saül Vélez, former postdoctoral researcher at nanoGUNE (now at ETH Zürich) mastered this challenge by electron beam lithography and etching of thin flakes of high - quality boron nitride provided by Kansas State University. (nanotech-now.com)
Previously, researchers have used either electron beam lithography or, more recently, the tiny styluslike arm of an atomic force microscope (AFM) to create nanometer - sized features on a surface. (sciencemag.org)